Diener ATTO - ZEPTO
ZEPTO configuration
- Volume of the chamber 2,6 liter
- Vacuümpump 2.5 m³/h
- Gas supply only with needle valves
- Vacuüm chamber
- Substraat carrier - tray
- Generator 40-100 kHz, 13.56 MHz
- One elektrode
- Manual operation
ATTO configuration
- Volume of chamber 10,5 liter
- Vacuüm pump 2.5 or 5 m³/h
- Gas supply only with needle valves
- Vacuüm chamber
- Substrate carrier/tray
- Generator 40-100 kHz, 13.56 MHz
- One elektrode
- Manual operation
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